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Effect of tert-butyl substituents in triphenylsulfonium cation on spectral properties and photochemical activity of photoacid generators

Nina Aleksandrovna Kuznetsova 1
Nina Aleksandrovna Kuznetsova
,  , 
Nikolay Vladimirovich Malimonenko 1
Nikolay Vladimirovich Malimonenko
, 
Tat'yana Aleksandrovna Pugacheva 2
Tat'yana Aleksandrovna Pugacheva
, 
Vladimir Gennadievich Kurbatov 2, 3
Vladimir Gennadievich Kurbatov
,  ,  , 
Sergei Vitalevich Karpov 2
Sergei Vitalevich Karpov
, 
Yana V Dorina 2
Yana V Dorina
, 
Georgy Vasil'evich Malkov 2
Georgy Vasil'evich Malkov
, 
Alexander Vital'evich Akkuratov 2
Alexander Vital'evich Akkuratov
1 Joint-Stock Company Research Institute of Organic Intermediates and Dyes, 123001 Moscow, Russian Federation
3 Yaroslavl State Technical University, 150023 Yaroslavl, Russian Federation
10.71267/mencom.7743
Published 2025-07-17
Communication , Volume 35, Issue 5, 546-549
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Kuznetsova N. A. et al. Effect of tert-butyl substituents in triphenylsulfonium cation on spectral properties and photochemical activity of photoacid generators // Mendeleev Communications. 2025. Vol. 35. No. 5. pp. 546-549.
GOST all authors (up to 50) Copy
Kuznetsova N. A., Kuznetsov I. E., Malimonenko N. V., Pugacheva T. A., Kurbatov V. G., Lolaeva A. V., Sideltsev M. E., Karpov S. V., Dorina Y. V., Malkov G. V., Akkuratov A. V. Effect of tert-butyl substituents in triphenylsulfonium cation on spectral properties and photochemical activity of photoacid generators // Mendeleev Communications. 2025. Vol. 35. No. 5. pp. 546-549.
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TY - JOUR
DO - 10.71267/mencom.7743
UR - https://mendcomm.colab.ws/publications/10.71267/mencom.7743
TI - Effect of tert-butyl substituents in triphenylsulfonium cation on spectral properties and photochemical activity of photoacid generators
T2 - Mendeleev Communications
AU - Kuznetsova, Nina Aleksandrovna
AU - Kuznetsov, Iliya Evgen'evich
AU - Malimonenko, Nikolay Vladimirovich
AU - Pugacheva, Tat'yana Aleksandrovna
AU - Kurbatov, Vladimir Gennadievich
AU - Lolaeva, Alina Vital'evna
AU - Sideltsev, Maxim Evgen'evich
AU - Karpov, Sergei Vitalevich
AU - Dorina, Yana V
AU - Malkov, Georgy Vasil'evich
AU - Akkuratov, Alexander Vital'evich
PY - 2025
DA - 2025/07/17
PB - Mendeleev Communications
SP - 546-549
IS - 5
VL - 35
ER -
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@article{2025_Kuznetsova,
author = {Nina Aleksandrovna Kuznetsova and Iliya Evgen'evich Kuznetsov and Nikolay Vladimirovich Malimonenko and Tat'yana Aleksandrovna Pugacheva and Vladimir Gennadievich Kurbatov and Alina Vital'evna Lolaeva and Maxim Evgen'evich Sideltsev and Sergei Vitalevich Karpov and Yana V Dorina and Georgy Vasil'evich Malkov and Alexander Vital'evich Akkuratov},
title = {Effect of tert-butyl substituents in triphenylsulfonium cation on spectral properties and photochemical activity of photoacid generators},
journal = {Mendeleev Communications},
year = {2025},
volume = {35},
publisher = {Mendeleev Communications},
month = {Jul},
url = {https://mendcomm.colab.ws/publications/10.71267/mencom.7743},
number = {5},
pages = {546--549},
doi = {10.71267/mencom.7743}
}
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Kuznetsova, Nina Aleksandrovna, et al. “Effect of tert-butyl substituents in triphenylsulfonium cation on spectral properties and photochemical activity of photoacid generators.” Mendeleev Communications, vol. 35, no. 5, Jul. 2025, pp. 546-549. https://mendcomm.colab.ws/publications/10.71267/mencom.7743.

Keywords

chemically amplified resist
Dill C parameter.
microelectronics
photoacid generator
quantum yield
sulfonium derivatives

Abstract

Four photoacid generators such as triphenylsulfonium triflate and nonaflate, 4-tert-butylphenyl(diphenyl)sulfonium nonaflate and tris(4-tert-butylphenyl)sulfonium nonaflate were synthesized, and their spectral characteristics were investigated in the polymer matrix. The dependence of the photosensitivity of resist films on the efficiency of absorption of actinic radiation and the quantum yields of acid generation was found. Triphenylsulfonium triflate salt and tris(4-tert-butylphenyl) sulfonium nonaflate were shown to be promising photoacid generators with a resist sensitive to irradiation by ArF and KrF excimer lasers, respectively.

Funders

Ministry of Education and Science of the Russian Federation
projects 125032604426-5 and