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Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K

Nikolai Mihailovich Rubtsov 1
Nikolai Mihailovich Rubtsov
, 
Georgii Igorevich Tsvetkov 1
Georgii Igorevich Tsvetkov
, 
Victor Iosifovich Chernysh 1
Victor Iosifovich Chernysh
10.1070/MC2006v016n01ABEH002176
Published 2006-01-31
Communication , Volume 16, Issue 1, 38-40
6
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Rubtsov N. M., Tsvetkov G. I., Chernysh V. I. Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K // Mendeleev Communications. 2006. Vol. 16. No. 1. pp. 38-40.
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Rubtsov N. M., Tsvetkov G. I., Chernysh V. I. Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K // Mendeleev Communications. 2006. Vol. 16. No. 1. pp. 38-40.
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TY - JOUR
DO - 10.1070/MC2006v016n01ABEH002176
UR - https://mendcomm.colab.ws/publications/10.1070/MC2006v016n01ABEH002176
TI - Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K
T2 - Mendeleev Communications
AU - Rubtsov, Nikolai Mihailovich
AU - Tsvetkov, Georgii Igorevich
AU - Chernysh, Victor Iosifovich
PY - 2006
DA - 2006/01/31
PB - Mendeleev Communications
SP - 38-40
IS - 1
VL - 16
ER -
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@article{2006_Rubtsov,
author = {Nikolai Mihailovich Rubtsov and Georgii Igorevich Tsvetkov and Victor Iosifovich Chernysh},
title = {Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K},
journal = {Mendeleev Communications},
year = {2006},
volume = {16},
publisher = {Mendeleev Communications},
month = {Jan},
url = {https://mendcomm.colab.ws/publications/10.1070/MC2006v016n01ABEH002176},
number = {1},
pages = {38--40},
doi = {10.1070/MC2006v016n01ABEH002176}
}
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Rubtsov, Nikolai Mihailovich, et al. “Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K.” Mendeleev Communications, vol. 16, no. 1, Jan. 2006, pp. 38-40. https://mendcomm.colab.ws/publications/10.1070/MC2006v016n01ABEH002176.

Abstract

In studies of the initiated ignition of dichlorosilane−oxygen mixtures it has been shown that rf discharge applied before ignition leads to an increase in the lifetime of aerosol particles in the reactor volume, in contrast to direct current discharge which markedly decreases the amount of aerosol particles formed in ignition. Ordered structures of the type of ‘liquid dust crystal’ have been detected in rf plasma of branching-chain heterophaseous reaction.

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