Abstract
Monophase films of the metastable cubic phase TixSiyNz(O) with the B1 structure have been synthesized; introduction of silicon atoms into the non-metallic sublattice of titanium oxynitride has been proved experimentally and theoretically.
References
1.
10.1070/MC1995v005n03ABEH000472_bib1
Toth
Metal Carbides and Nitrides,
1971
2.
10.1070/MC1995v005n03ABEH000472_bib2
Gubanov
Electronic Properties of TM Refractory Carbides and Nitrides,
1994
3.
Håkansson G., Sundgren J.-., McIntyre D., Greene J.E., Münz W.-.
Thin Solid Films,
1987
4.
Knotek O., Leyendecker T.
Journal of Solid State Chemistry,
1987
5.
10.1070/MC1995v005n03ABEH000472_bib5
Kuznetsov
Poverkhnost,
1989
6.
Hultman L., Håkansson G., Wahlström U., Sundgren J.-., Petrov I., Adibi F., Greene J.E.
Thin Solid Films,
1991
7.
leR. Strydom I., Hofmann S.
Journal of Electron Spectroscopy and Related Phenomena,
1991
8.
Martin P.J., McKenzie D.R., Netterfield R.P., Swift P., Filipczuk S.W., Müller K.H., Pacey C.G., James B.
Thin Solid Films,
1987
9.
Kuznetsov M.V., Zhuravlev M.V., Shalayeva E.V., Gubanov V.A.
Thin Solid Films,
1992
10.
Lemperière G., Poitevin J.M.
Thin Solid Films,
1984
11.
10.1070/MC1995v005n03ABEH000472_bib11
Kuznetsov
Poverkhnost,
1994