Keywords
chemical vapor deposition
CVD
graphene
molecular dynamics
Ni substrate.
ReaxFF
Abstract
Molecular dynamics simulation of carbon vapor deposition on Ni substrate in the temperature range from 300 to 1750 K was performed. It was found that at temperatures below 1000 K, ordered carbon structures are most actively formed in the gas phase. At temperatures of 1000-1500 K, carbon rings are formed near the surface of the Ni substrate, and close to the melting temperature, no structures are observed.
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