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Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties

Vladimir Georgievich Sevastyanov 1
Vladimir Georgievich Sevastyanov
,  , 
Petr Anatol'evich Ignatov 1
Petr Anatol'evich Ignatov
, 
Viktor Sergeevich Popov 1
Viktor Sergeevich Popov
, 
Andrei Viktorovich Churakov 1
Andrei Viktorovich Churakov
, 
Nikolai Timofeevich Kuznetsov 1
Nikolai Timofeevich Kuznetsov
, 
Vladimir Semenovich Sergienko 1
Vladimir Semenovich Sergienko
10.1016/j.mencom.2012.09.003
Published 2012-09-17
Communication , Volume 22, Issue 5, 239-241
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Sevastyanov V. G. et al. Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties // Mendeleev Communications. 2012. Vol. 22. No. 5. pp. 239-241.
GOST all authors (up to 50) Copy
Sevastyanov V. G., Simonenko E. P., Ignatov P. A., Popov V. S., Churakov A. V., Kuznetsov N. T., Sergienko V. S. Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties // Mendeleev Communications. 2012. Vol. 22. No. 5. pp. 239-241.
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TY - JOUR
DO - 10.1016/j.mencom.2012.09.003
UR - https://mendcomm.colab.ws/publications/10.1016/j.mencom.2012.09.003
TI - Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties
T2 - Mendeleev Communications
AU - Sevastyanov, Vladimir Georgievich
AU - Simonenko, Elizaveta Petrovna
AU - Ignatov, Petr Anatol'evich
AU - Popov, Viktor Sergeevich
AU - Churakov, Andrei Viktorovich
AU - Kuznetsov, Nikolai Timofeevich
AU - Sergienko, Vladimir Semenovich
PY - 2012
DA - 2012/09/17
PB - Mendeleev Communications
SP - 239-241
IS - 5
VL - 22
ER -
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@article{2012_Sevastyanov,
author = {Vladimir Georgievich Sevastyanov and Elizaveta Petrovna Simonenko and Petr Anatol'evich Ignatov and Viktor Sergeevich Popov and Andrei Viktorovich Churakov and Nikolai Timofeevich Kuznetsov and Vladimir Semenovich Sergienko},
title = {Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties},
journal = {Mendeleev Communications},
year = {2012},
volume = {22},
publisher = {Mendeleev Communications},
month = {Sep},
url = {https://mendcomm.colab.ws/publications/10.1016/j.mencom.2012.09.003},
number = {5},
pages = {239--241},
doi = {10.1016/j.mencom.2012.09.003}
}
MLA
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Sevastyanov, Vladimir Georgievich, et al. “Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties.” Mendeleev Communications, vol. 22, no. 5, Sep. 2012, pp. 239-241. https://mendcomm.colab.ws/publications/10.1016/j.mencom.2012.09.003.

Keywords

CVD
films
precursor
tin hexafluoroacetylacetonate
tin oxide

Abstract

A new method for the synthesis of volatile tin(ii) hexafluoroacetylacetonate [Sn(C5HO2F6)2] was suggested, the compound was characterized by elemental analysis, IR spectroscopy, and DTA/TGA; the crystal structure was established by X-ray diffraction; the morphology and composition of the coating deposited by atmospheric pressure chemical vapour deposition were studied by SEM-EDX and XRD.

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